An electron beam does not diffract at atomic scales, so it does not cause blurring of the edges of features.
由于电子束在原子尺度不会绕射,所以它不会使得图案细节的边缘模糊。
The Young's modulus of silicon nano-beam on <100> direction was measured by bending test method using an atomic force microscope(AFM).
阐述了基于原子力显微镜(AFM)的弯曲测试测量纳米梁杨氏模量的理论和方法。
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