a substrate holding portion
a substrate holding portion rotatably provided in the reaction chamber and configured to hold a substrate;
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a substrate holding portion
衬底保持部分
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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The connecting part (21) comprises an elastic holding portion for holding the package (14) and a connection portion to be connected with the substrate (2).
该连接部件(21)具有：保持上述封装件(14)的具有弹性的保持部；以及与上述基板(2)连接的连接部。
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