A new precise actuator with 2 degrees of freedom for translational and rotational motions actuated by the impact force of an end-loaded piezoelectric bimorph cantilever was proposed.
研制了一种以自由端带有集中质量的悬臂式压电双晶片为驱动单元、具有移动和旋转二自由度的惯性冲击式精密驱动器。
Shear force detection is carried out by using a symmetric piezoelectric bimorph sensor, which provides an easy way not only for probe-surface distance control but also for imaging.
利用结构对称的双压电陶瓷传感器实现了切变力的探测，并为探针-样品的间距控制与成像提供了一种有效手段。
Structural design and mechanism analysis of a valveless piezoelectric pump with single bimorph and double chambers;
介绍了压电泵的单腔体结构和多腔体结构，而多腔体结构的压电泵是今后研究的一个主要方向。
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