VTLEBUF 01型电动高真空蝶阀是以电动装置驱动阀杆与阀板执行启闭动作。
VTLEBUF01 electric high vacuum butterfly valve USES electric device to drive the stem disc to perform open close action.
本发明涉及一种高真空离子束溅镀靶材利用率增强装置。
The invention relates to a device for improving utilization rate of a high vacuum ion beam sputtering target material.
整个装置在高真空下运转。
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