放电为磁场激励型，稳定的等离子体由电磁场所维持，空间电荷产生的静电场引起荷电粒子的双极扩散。

A steady state plasma is maintained by electromagnetic field and ambipolar diffusion of charged particles is caused by electrostatic field of space charge.

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大量静电荷可能在床内积聚而引起火花放电。

Large static charges may build up in the bed causing spark discharges.

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静电放电(esd)是指一定量的电荷从一个物体(例如人体)转移到另一个物体上(例如芯片)的过程。

Electrostatic discharge (ESD) is a process in which a finite amount of charge is transferred from one object (i. e., human body) to the other (i. e., microchip).

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