...中国论文网 关键词： 钽酸锂薄膜;热释电红外气体传感器;双通道结构;光源波动. [gap=700]Keyword: lithium tantalate thin films; pyroelectric infrared gas sensor; dual-channel structure; light fluctuations.
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着重分析了钽酸锂薄膜材料的新制备技术，以及在热释电红外传感器应用方面的研究现状；
The recent researches of the new preparation technologies of the LiTaO3 thin film and its applications in pyroelectric infrared sensors are summarized in detail.
用醋酸锂和乙醇钽作为起始反应物，通过溶胶凝胶工艺生成了对红外敏感的钽酸锂薄膜，并详细讨论了基于钽酸锂薄膜的红外探测器件制备工艺。
The LiTaO3 thin film was chosen as infrared sensing film and prepared by a sol-gel process using lithium acetate and tantalum ethoxide as starting materials.
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