...(氮氧化矽)薄膜沉积 II-V 刻蚀应用(III-V etching) 沟槽刻蚀(Trench etching) 钝化层刻蚀(Passivation etching) 聚酰亚胺刻蚀(Polyimide etching ) 亚纳米级刻蚀(Submicron etching) BM8-II 反应离子刻蚀(RIE)/沉积(PEVCD)等离...
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钝化层刻蚀
Passivation layer etching
以上为机器翻译结果,长、整句建议使用 人工翻译 。
在鞘层内存在大量高能离子,除表面反应外,离子还能对粉粒表面进行刻蚀,因此钝化效应将消失。
There were a lot of high energy ions in the sheath area, beside the surface reactions, the surface of particulates could be etched by the ions, and the passivation effect would be eliminated.
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