Metal Induced Crystallization
关键词 : 金属诱导结晶 ; 非晶 SiGe 薄膜 ; 固相结晶 [gap=9871]Key words: m etal induced crystallization; amo rphous SiGe th in flim ; so lid phase crystallization
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短语
金属诱导横向结晶
Metal Induced lateral Crystallization
型金属诱导横向结晶
Metal Induced lateral Crystallization
和金属诱导横向结晶
Metal InducedLateral Crystallization
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