对准控制采用阶梯步长逐步逼近算法，并且引入了机械手姿态调整后的补偿控制，以提高对准效率。
Furthermore, a stepwise approach with varying step lengths, and a compensation strategy following the manipulator's rotation are introduced in the IC mask alignment.
随着迭代次数的增加，迭代区间将逐步减小，直至逼近真值，由此即可构造定界迭代算法。
Along with the increasing of iteration times, iterative range will gradually dwindle until approach to true value, and demarcation iterative algorithm can be constructed.
由此提出一种算法，通过逐步修正求解得到的设计点以实现在设计点附近较高精度地逼近结构真实极限状态方程。
Therefore an algorithm is developed to (approximate) the limit state equation accurately around the true design point through iterative modifications for the design point solution.
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