关键词 微流控技术； 细胞培养；免疫荧光反应；软光刻技术 [gap=975]KEYWORDS Microfluidic Technology; Cell Culture; Immunefluorescence; Soft Lithography
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介绍了一种用软光刻技术制作微流芯片上PDMS微混合器的工艺。
A process of soft lithography was introduced for fabrication of PDMS (polydimethylsiloxane) micro-mixer on micro-fluidic chip.
以紫外光光刻、硅蚀刻及软光刻技术制备了微柱阵列型细胞培养基底。
UV lithography, silicon etching and soft lithography were adopted to fabricate micropillar arrayed cell culture substrates.
为了解决软光刻技术中核心元件弹性印章的制备技术，对SU-8胶印模和聚合物弹性印章进行了工艺研究。
Processes of SU-8 photoresist mold and polymer elastomeric stamp were researched in order to solve the technology of the key part—elastomeric stamp in the soft-lithography.
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