提出了一种微机械谐振式压力传感器的新结构。
对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。
The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper.
在谐振器动力学分析的基础上，系统地比较了谐振式压力传感器检测速度谐振频率和检测位移谐振频率的优缺点。
Based on dynamic analysis of resonator, speed resonant frequency detection for the resonant pressure sensor is compared to displacement resonant frequency detection systematically.
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