表面钝化工艺就是在半导体器件表面覆盖保护介质膜，以防止表面污染的工艺。
本文概述了非晶硅的表面钝化工艺及其钝化效果，对其钝化机理也进行了讨论。
The passivation technology, effects and passivation mechanism are expounded and discussed in this paper.
为了提高铜及其合金的表面抗变色能力，研制了一种环保的化学抛光工艺和含稀土盐的新型钝化工艺。
An environmentally-friendly chemical polishing and passivation process was established for copper and its alloys, using a rare earth salt in the passivation solution.
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