thin film insulated gate transistor
... 薄膜晶体管 thin film transistor; 薄膜绝缘栅晶体管 thin film insulated gate transistor; 薄膜刻图 film scribing; ...
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与此同时，制备高质量的栅绝缘层用氮化 硅薄膜也是制备高性能薄膜晶体管（TFT）这一课题的需要。
On the other hand, it is essential to prepare high quality silicon nitride thin film for gate insulator layer of TFT in order to get excellent TFT.
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