并研究了工艺参数对薄膜沉积速率、硬度和表面粗糙度的影响。
The effect of technical parameters on deposition rate, hardness and surface roughness of DLC films were researched.
氧分压和沉积速率对YSZ薄膜残余应力的影响。
Influences of Oxygen Partial Pressure and Deposition Rate on Residual Stress of YSZ Thin Films.
研究了各种实验参数对沉积速率、薄膜组成及膜层硬度的影响，认为偏压是最具影响的参数。
The influence of various experimental parameters on deposition rate film composition and hardness has been studied, Bias is considered as the most effective Darameter.
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