建立了由微机械薄膜变形镜(MMDM)构成的微小型自适应光学系统，该系统具有低成本、低能耗、体积小的特点。

A microminiature adaptive optics system with a 37-channel micromachined membrane deformable mirror (MMDM) were built, which features low cost, low power consumption, small size.

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运用有限元法对不同工况下平面薄膜反射镜的变形进行了计算。

By using finite element method, the deformations of flat membrane mirror have been calculated.

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