该方法提高了MOCVD系统的自动化控制水平，确保了工艺的重复性和稳定性，使得MOCVD系统气体流量控制水平有显著提高。

This method improves the automatic control level of MOCVD and ensures the repeatability and stability of the process, which significantly improves the level of the...

youdao

该方法提高了MOCVD系统的自动化控制水平，确保了工艺的重复性和稳定性，使得MOCVD系统气体流量控制水平有显著提高。

This method improves the automatic control level of MOCVD and ensures the repeatability and stability of the process, makes MOCVD system gas...

youdao