本文介绍了一种用于高精度测量图案棱边直线性的装置。
An Equipment for high precision measurement of pattern edge linearity is described in this paper.
本发明的一种用线性真空计测量真空容器容积比的装置及方法，属于测量技术领域。
The invention discloses a device and a method for measuring a volume ratio of a vacuum container by a linear vacuometer, and belongs to the technical field of measurement.
文章综述了测量非线性光学(nlo)聚合物薄膜材料光波导传输损耗的三种新方法及原理，分别给出了典型的实验装置结构图，并对它们的特点进行了比较。
The principles of the common methods to measurement the propagation loss of the NLO polymer film optical waveguide are summarized, and the typical experimental arrangements are presented.
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