因此，研究纳米多层氧离子导体电解质薄膜结构、电学性能和稳定性已成为一个重要研究内容。
Therefore, the study of oxygen ion conductor electrolyte nanometer multilayer film structure, electrical properties and stability has become an important research.
本文描述了形成包括多层纳米结构化支承元件的薄膜的工艺。
Processes for forming films comprising multiple layers of nanostructured support elements are described.
用RFMS-4射频磁控溅射仪制备纳米多层膜技术稳定可靠，在优化工艺条件下能保证薄膜成分和溅射速率的稳定性。
The concentration and deposition rate of the films are controllable with the optimization parameters on the RFMS-4 sputtering apparatus.
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