removing of photoresist by plasma
... photoresist 光致抗蚀剂 photoresist burnoff 等离子去胶 photoresist coater 涂胶器 ...
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等离子去胶
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等离子去胶机 plasma stripper
氧等离子体去胶 oxygen gas plasma stripping
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在有图形的片子上得到的扫描电镜检查结果显示了在等离子去胶和随后的湿法清洗后的清洁度、良好的图形轮廓和图形结构的关键尺寸保持情况。
SEM inspection results obtained on patterned wafers show the cleanliness, good profile and CD retention of the structures after the He:H2 plasma strip and subsequent wet cleans.
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