建立了等离子体基离子注入过程中试样温度预测的理论模型，应用这个模型进行了一系列数学模拟。
A theoretic model for prediction of sample temperature during plasma based ion implantation was established, and computer simulation was done with the model.
采用等离子体基低能离子注入装置在不同注入温度、气压条件下氮离子注入316奥氏体不锈钢。
The surface modification of 316 austenitic stainless steel has been investigated by plasma-based low-energy ion implantation apparatus at various temperatures and working atmospheric pressure.
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