...字: 碳热法；稀土硅化物合金；热物性参数；电阻率[gap=1098]Key words: carbon thermal reduction; rare earth silicide alloys; thermophysical properties; specific resistance..
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稀土硅化物合金 rare earth silicide alloys ; rare earth silicide alloy ; re-silicide alloy ; re silicide alloy 多晶硅硅化物栅极 polycide gate ..
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