ion assistant deposition
离子辅助蒸发
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离子辅助蒸发系统 Ion Beam Assisted Evaporation System
等离子体辅助蒸发沉积 Plasma enhanced evaporation
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采用氧离子辅助电子束反应蒸发工艺在K9玻璃基底上制备了性能优异的ITO薄膜。
High quality ITO films are prepared onto K9 glass substrates by oxygen ion-assisted electron beam reactive evaporation.
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