ion etching equipment
... ion etching离子刻蚀 ion etching equipment离子刻蚀设备 ion exchange membrane离子交换膜 ...
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反应离子刻蚀设备 Reactive Ion Etching Machine
等离子刻蚀设备 Etcher ; plasma etching apparatus
·2,447,543篇论文数据，部分数据来源于NoteExpress
通过深紫外光刻和感应耦合等离子刻蚀设备，制备了所设计的器件。
The designed SOI nanowire AWGs were fabricated using ultraviolet lithography and induced coupler plasma etching.
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