...光广场 内蒙古工业大学 关键词： CMP； 碱性抛光液； 水溶胶； 应力 [gap=712]Keywords： CMP； Alkalescence polishing liquid； Hydrosol； Stress ...
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...;碱性抛光液;去除速率;表面粗糙度 [gap=731]Keywords: tungsten plug;chemical mechanical planarization(CMP);alkaline slurry;remove rate;surface roughness ...
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... 串联质谱法 tandem mass spectrometry 碱性抛光液 slurry of organic alkali 飞程 flight distance ...
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主要研究了适合铝及铝合金的碱性化学抛光液及抛光工艺。
This paper focuses on the study of the solution and process for alkaline chemical polishing aluminum and its alloy.
开发出了弱碱性溶液中紫铜化学抛光新工艺，确定了抛光液中的光亮剂(包括缓蚀剂和表面活性剂)。
A new technology for chemical polishing of copper in weak alkaline solution has been developed and a brightener (containing corrosion inhibitor and surfactant) has been found out.
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