本文研究了激光诱导化学气相沉积法制备纳米氮化硅的工作原理，提出了减少游离硅的措施，利用双光束激发制备了超微的、非晶纳米氮化硅粉体。

It is used in many areas. In this paper, the general principles of LICVD (laser induced chemical vapor deposition) were investigated and the measures to reduce dissociated si were put forward.

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目前，硅粉直接氮化法是制备氮化硅应用最普遍的方法。

There are two methods for synthesis of the fluoroporphyrins: direct and indirect fluorination.

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