论述了新颖的硅基材料研究现状及应用前景。
The present status of research and the application prospect of novel materials based on silicon are reviewed in this paper.
硅基发光一直是硅基材料和器件研究的重要课题。
Luminescence based on silicon has always been the key subject of the study of Si-based materials and devices.
随着MEMS器件的广泛研究和快速进步，非硅基材料被广泛用于MEMS器件中。
With the development of micro-electromechanical systems, non-silicon materials have been widely used in MEMS.
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