叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
对硅基锆钛酸铅(PZT)压电薄膜微传感器进行了结构和版图设计。
The structural and territorial design of PZT thin film micro-sensors is processed.
利用有限元分析工具ANSYS，对所设计的硅基微结构气体传感器的温度场进行了模拟。
The temperature distributing of micro-structure gas sensor based on silicon substrate is simulated by means of finite element analysis (FEA) tool ANSYS.
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