文中介绍采用可编程序控制器改进单机单片磁控溅射真空镀膜机的设计和运行情况。

The design and running state which PLC improved magnetic - control vacuum membrane plate machine has been introduced.

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介绍了基于FPGA的太阳能真空集热管磁控溅射镀膜机控制系统的整体设计和工程实现过程。

This paper introduces an integrated design and implementation of the SCS control system based on FPGA.

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本设计主要对磁控溅射镀膜机真空室进行改进设计，以改善磁控溅射镀膜的工艺条件。设计内容包括真空室及相关机构设计、计算。

This design aims at the characteristics of magnetron sputtering deposition, and mainly ameliorate the design of the chamber of the magnetron sputtering machine.

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