阴极是真空微电子器件的核心部件之一。
Cathode is one of the core components of vacuum microelectronic devices.
本文介绍了真空微电子器件场发射金属尖阵列阴极的制备工艺技术。
This paper describes a fabrication technology of metal tip field emission arrays (FEA) for the vacuum microelectronic devices.
场发射阴极作为各种真空微电子器件的核心，其性能的好坏将直接决定着场发射器件的总体性能。
The whole performance of device depends on the capability of field emitting cold cathodes which act as the kernel of all kinds of vacuum micro-electronics device.
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