真空压力传感器是工业实践中常用的一种压力传感器,其广泛应用于各种工业自控环境,涉及石油管道、水利水电、铁路交通、智能建筑、生产自控、航空航天、军工、石化、油井、电力、船舶、机床、管道送风、真空设备等众多行业。
阐述了真空微电子压力传感器阵列的工作原理和工作波形。
The working principle and working wave shape of the vacuum micro electronic pressure sensor is described.
提出了一种带过载保护功能的真空微电子压力传感器。
A vacuum micro-electronics pressure sensor with the function of overloading protection is brought forward.
研究了真空微电子压力传感器的力学和电学特性、传感器结构及相应的计算与模拟。
The mechanical property and electricity property of the vacuum micro electronic pressure sensor is studied and relevant computation and simulation are carried out.
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