评述砷化镓中硅SIMS定量分析的进展，讨论了相对灵敏度因子法。
The development on quantitative analysis of si in GaAs by SIMS is reviewed critically. Therelative sensitivity factor (RSF) method is discussed in detail.
具体给出了用相对灵敏度因子的内标法确定样品中各元素(绝对或相对)含量的计算公式。
A formula is deduced to calculate the contents (absolute or relative) of some elements in a sample by internal standard method with the aid of relative sensitivity factors.
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