...1-15 【摘要】采用激光剥蚀电感耦合等离子体质谱法(LA-ICP-MS),以NIST玻璃标准物质制作校准曲线,29Si为内标,相对灵敏度因子(RSF)校准标样和样品间的基体效应,对碳化硅陶瓷器件中9种痕量元素(B,Ti,Cr,Mn,Fe和Ni等)进行定量测定。
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【Key words】 Appearance potential spectroscopy (APS); Element sensitivity; Relative sensitivity factor
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相对灵敏度因子法 Relative sensitivity factor method
采用相对灵敏度因子(RSF)进行质谱定量分析。
The quantitative analysis was carried out by using relative sensitivity factors (RSF).
评述砷化镓中硅SIMS定量分析的进展，讨论了相对灵敏度因子法。
The development on quantitative analysis of si in GaAs by SIMS is reviewed critically. Therelative sensitivity factor (RSF) method is discussed in detail.
由此方法还可得到稳定的、具有普遍意义的注入元素在基体中的二次离子相对灵敏度因子。
Meanwhile, relative sensitive factor of secondary ion of implanted element can be obtained by this method.
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