...术的光机电(Opto-mechatronics)；著重于微小化(Downsizing)的微机电系统技术(MEMS, Micro-electromechanical Systems Technology)与奈米机电技术(NEMS, Nano-electromechanical Systems Techn..
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...整合产品之生产与制造论文发表 了：引入光电技术的光机电(Opto-mechatronics)；著重于微小化(Downsizing)的微机电系统技术(MEMS, Micro-electromechanical Systems Technology)与奈米机电技术(NEMS, Nano-electromechanical Systems Techn..
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对投影型微光学编码器的原理进行了分析，结合微机电系统集成技术，提出并实现了投影型微光学编码器。
The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
主要讨论了微机电系统主要的设计方法以及微机电系统技术在磁力轴承中的应用，最后指出了目前微机电系统技术所面临的主要问题及其发展趋势。
The main design method and the application in the AMB of MEMS are studied in detail. Finally, the main problems and the development trend of MEMS are indicated.
提出了利用微机电系统（MEMS）技术，采用新的元器件以及数字化中频技术来提高接收机集成度的方法。
Several means adopted in MEMS technique by using new element and IF digitized are put forward to improve integration of the receiver.
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