根据硅微泵的结构特点，制作出用于微型泵的电磁致动器，并对该电磁致动器进行了分析与振动测试。
A electromagnetic actuator was designed and fabricated to drive silicon micro-pump membrane. Some theoretical analysis and experimental evaluation were made in this paper.
讨论了纳米冲击式电磁致动器工作原理，给出冲击式电磁致动器的一些典型结构，并介绍一种新原理组合式致动器。
This paper discusses the principle of nanometer electromagnetic impulsive actuators, gives some typical structures, and presents a combination actuator of new mechanism developed by the authors.
电磁结构设计中，采用电磁场解析计算进行初步设计，进而采用有限元法对致动器的结构和线圈参数进行进一步的分析与优化。
The magnetic circuit structure of actuator is designed by analysis method. The structure and parameters are analyzed and optimized by electromagnetic field FEM.
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