用射频磁控溅射法在阳极氧化铝模板表面制备了金属铝膜。
Metal aluminum films were deposited on AAO templates by radio-frequency magnetron sputtering.
用RFMS-4射频磁控溅射仪制备纳米多层膜技术稳定可靠,在优化工艺条件下能保证薄膜成分和溅射速率的稳定性。
The concentration and deposition rate of the films are controllable with the optimization parameters on the RFMS-4 sputtering apparatus.
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