Chinese Journal of Sensors and Actuators 关键词： 玻璃衬底，温差式，空气流量传感器 [gap=861]Keywords: glass substrate, temparemet difference, air flow sensor
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Trimethylaluminium(TMA) and water vapour(H2O) were used as the chemical precursors to deposit Al2O3 films on glass substrates at temperature of 250 ℃ and 300 ℃ respectively.
以三甲基铝(TMA)和水为前聚体,分别在基板温度为250℃和300℃的K9和石英玻璃衬底上沉积了Al2O3光学薄膜。
参考来源 - 原子层沉积制备Al·2,447,543篇论文数据，部分数据来源于NoteExpress
玻璃衬底与非晶硅膜之间的非晶氮化硅膜对非晶硅膜的晶化没有明显影响。
The amorphous silicon nitride film between amorphous silicon film and glass substrate is found to have no any effects on the crystallization.
在玻璃衬底和ITO阳极之间溅射的光学干涉层可以部分消去背景光的反射。
The optical interference layers are deposited between the glass substrate and ITO(indium tin oxide) anode, which could partly suppress the reflection of ambient light.
传感器芯片在玻璃衬底上采用两步mems剥离工艺加工，加工工艺简单可靠。
The sensor was fabricated on ceramic substrate, using two step MEMS lift-off processes.
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