采用微波三探针研究了环形波导等离子体源阻抗特性随运行参数的变化。
A microwave three probe system has been used to study the changes of annular waveguide plasma source impedance with operational parameters.
环形波导内侧开有多个狭缝用来激励产生等离子体。 利用该源研究了气压对等离子体参数、击穿功率和熄灭功率的影响。
The source has been used to study the effect of pressure on argon plasma parameters and microwave power for plasma ignition and extinction.
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