经过了解晶片的预习处理，我们实现了这种清洗设备背面清洗效果的评价。
Having the understanding of the wafer preparation, we carried out an evaluation of the tool's backside cleaning.
通过改变夹心式换能器压电晶片的堆放位置及组数，使超声清洗换能器具有两个明显的谐振峰。
By changing the stack position and quantity of the piezoelectricity chip of piezoelectric ceramic sandwich transducer we can make the washing transducer bear two obvious resonance peaks.
通过旋转晶片，并利用离心力去除更大部分的停滞层，每个清洗循环可将清洗效率再提高10倍眼1演。
A further 10 fold improvment in rinsing efficiency per rinse cycle can be achieved by spinning the wafer and using centrifugal force to remove a greater fraction of the stagnant layer (1).
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