对椭偏术基本方程进行数学处理，应用微型计算机可由测量值直接求得未知参数。

After mathematical treatments of ellipsometry basic equations, unknown parameters can be obtained directly from measured data by means of the microcomputer.

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用某炼油厂职业卫生监测数据为例，在EXCEL电子表格中，介绍了应用最大似然法（MLE）处理检测限以下测量值中的步骤。

Steps of maximum likelihood estimation(MLE) in EXCEL spreadsheet were illustrated at length with the example of measurements from a refinery.

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利用卡尔曼滤波对测量值进行噪声处理，物理实验数据的结果验证了本文方法的有效性。

The Kalman filter is used to fuse noisy sensor data. The experimental results demonstrate the availability and effectiveness of this method.

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