...甲基铵的新型菌株以及利用所述菌株的废水处理方法 [技术摘要] 本发明涉及可分解氢氧化四甲基铵(tetramethyl ammonium hydroxide，TMAH)的新型菌株以及利用所述菌株的废水处理方法。
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介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性，论述了在单晶硅和多晶硅高温压力传感器的制作过程中，TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。
Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed.
然后在四甲基氢氧化铵催化下与正硅酸乙酯反应，制得笼状乙烯基倍半硅氧烷；
Then the new cage-like vinyl silsesquioxanes(VS) were synthesized by the reaction of vinyl-tetra-coordinate silicon with tetraethyl orthosilicate in the condition of tetramethyl ammonium hydroxide.
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