为了达到这一要求，提出了气动伺服加载系统并引入特殊设计的气动数字伺服阀。
A pneumatic servo loading system was proposed and a specially designed pneumatic digital servo valve was introduced in the system for the purpose of precise control.
结果表明气动伺服加载系统能满足双面抛光的要求，可以加工出双面超平滑的硅片。
This pneumatic servo load system can satisfy the needs of double-sided polishing machine, which can successfully produce the ultra-smooth and flat surface on both sides of silicon wafer.
为了达到这一要求，提出了气动伺服加载系统并引入特殊设计的气动数字伺服阀。同时对气动伺服加载系统进行数学建和模块化分析，最后进行了实验研究。
A pneumatic servo loading system is proposed and a specially designed pneumatic digital servo valve is introduced in the system for the purpose of precise control.
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