相对于传统PID主从同步控制方法，同步偏差的移动平均差减小18.2%，移动标准差减小61.5%，可以保证光刻机的曝光效果。

Compared with the conventional PID masterslave control method, the move mean difference is reduced by 18.2% and the move standard deviation is reduced by 61.5%, and the exposure effect can be ensured.

youdao

本发明公开了一种曝光影像偏差的校正方法和成像装置。

The invention discloses a method for calibrating the bias of an exposure image and an imaging device.

youdao