阐述了3DSIS的功能和应用，提出了3DSIS与数值分析方法、专家系统耦合集成的模型。
The function and application of 3DSIS are shown. The integrated model of 3DSIS, numerical analysis method and expert system is suggested.
应用谐波平衡法对系统三阶非线性微分方程组解析分析，与数值解比较验证了解析解的正确性和有效性。
The method of harmonic balance is applied to study the non-linear dynamic response of the third-order nonlinear partial differentiation system.
应用数值分析方法对这一模型求解，得到与实验相符的杂质原子扩散分布；
Zn diffusion profiles calculated from this model with numerical method were in good agreement with the results of experiment.
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