在本论文中，我们提出了一种基于内插滤波的高效率演算法以降低复杂度运算量。
In this thesis, efficient algorithms based on interpolated filtering are developed to solve the problem.
该演算法具有矫正精度高、灵活性强和矫正效率较高的特点，适合于版图中关键图形的矫正。
The algorithm has such merits as high accuracy of correction, high adaptability, and high efficiency, which make it very appropriate to be used in critical features on layout.
研究了有限元正演算法的效率和精度、吸收边界条件等方面的问题，以提高反演系统的效率和精度。
To improve the efficiency and accuracy of the inversion system, problems such as the efficiency and accuracy of the forward modeling system, absorbing boundary conditions and so on, are also studied.
应用推荐