所谓真空于燥，就是将干燥物料处在真空条件下，进行加热干燥，如果利用真空泵进行抽气抽湿，则加快了干燥速率。

It is well known that vacuum drying is to put raw material under the state of vacuum for heating and drying. If use vacuum to pump air and humidity out, the dry speed will be faster.

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干式真空泵中最重要的部件就是阴、阳螺杆转子，转子型线及其热力学性能决定了泵的抽气性能。

The driving and driven screw rotors are the most important components. The rotor profile and thermodynamic performance determine the pumping performance of pump.

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在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。

At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.

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