... 抗光蚀处理 photoresist process 抗光蚀涂层 photoresist coating 抗光蚀 photoresist ...
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光阻抗蚀剂涂层 photoresist coatings
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本发明的涂料组合物可用作光致抗蚀剂的覆盖涂层，包括可用在浸渍平版印刷工艺中。
Coating compositions of the invention are useful as photoresist overcoat layers, including in immersion lithography processing.
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