针对法兰盘加工面上出现的黑纹缺陷，采用光学显微镜、扫描电镜和电子探针等测试方法对其进行了分析。
Analysis is made on the dark lines defects occurring over the working surface of flange by measurement with the optical microscope, Scanning electro microscope (SEM) and electronic probe.
利用扫描探针显微镜(SPM)能够实现纳米级电子器件和机械器件的加工。
Nanofabrication in electrical field by Scanning Probe Microscope (SPM) can fabricate electrical devices and mechanical structures in nanometer scale.
扫描探针显微镜(SPM)现在不仅用于表面微观形貌的检测，同时也用于纳米超精密加工和原子操纵。
Scanning probe microscope (SPM) is used not only for measuring the micro profiles of surfaces, but also for nano ultraprecise machining and atom manipulation now.
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