对于反应溅射，可通过连续改变反应气体流量制得化学成分比连续变化的梯度薄膜。

For reactive sputtering, the gradient films with varying ratio of chemical component can be prepared by changing gas flow rate continuously.

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发明涉及一种在室温条件下制备具有成分梯度的高频铁磁薄膜材料的方法。

The invention relates to a method for preparing a high-frequency ferromagnetic film material with component gradient under the room temperature condition.

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