本文给出一种部分相干照明条件下元象差显微物镜成象特性的快速模拟算法。
This paper presents a new algorithm used for fast simulating the image formation characteristics of aberration-free system with partly coherent light.
同时，在具体反演中使用快速模拟退火算法，可以克服目标函数局部极值的限制，从而获得全局最优解。
Meanwhile, we use a fast simulation annealing algorithm in the inversion, which can overcome the limitation of the local extremum of objective function, and acquire a global optimum result.
正交偶极子各向异性反演中一般采用快速模拟退火算法(VFSA)。
Very fast simulated annealing method (VFSA) is used in cross dipole anisotropy inversion commonly. A modified VFSA was provided.
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