... micro-nano fabrication 微纳制造 Challenges of Nano-Optic Device Fabrication 米光电元件制作的挑战 Micro-Nano Fabrication Technologies 微纳米加工技术 ...
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提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构，介绍了其工作原理和系统构成。
A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced.
中心的研究方向，主要从事微纳米加工技术、微纳米材料以及微纳米器件与系统的研究与应用，并为国内外产业及研究机构服务。
Thee current research fields of the center are micro and nano fabrication technologies, micro and nano materials, and micro and nano systems.
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